Thermo Scientific nProber IV nanoprober platform

Thermo Fisher Scientific has released the Thermo Scientific nProber IV nanoprober platform — a fault isolation system used by semiconductor fabs to precisely locate and characterise the nanometre-scale electrical faults that impact device performance. The product provides high levels of automation and precision for semiconductor yield engineers as they perform logic and memory failure analysis, giving users the data required for a fast and efficient fault analysis process.

Failure analysis lab managers who need to improve the efficiency of their TEM workflows can take advantage of the automation and guided operation built into the system. It has been designed to enable production-oriented, precise fault localisation, while reducing the need for expert users.

The product provides specific localisation and electrical characterisation of parametric faults in FinFET transistors by combining an ultrastable, temperature control probing platform and low-energy electrostatic nanoprobing LEEN2 SEM column that enables probing at 100 eV to support advanced technologies. Transistor characterisation at less than 1 ns pulsing is said to improve the detection of resistive gate faults.

The device introduces the second-generation EBIRCH2 detection system for enhanced sensitivity and the precise localisation of low impedance faults. EBIRCH2 fault localisation is combined with the LEEN2 SEM column that can operate at up to 100 nA, allowing the nProber IV to localise faults in 3D NAND and interconnect structures.

Finally, efficiency is enhanced with the easyProbe automation system, which automates much of the nanoprobing workflow and allows for extended periods of unattended operation. This enables users to spend time on other tasks in the FA lab while the product continues to operate.