Mass-Vac MV Multi-Trap Vacuum Inlet Traps

Mass-Vac manufactures a broad range of high-capacity vacuum inlet traps that protect vacuum pumps in manufacturing processes.

MV Multi-Trap Vacuum Inlet Traps are suitable for MOCVD, HVPE, GaN and ALGaN processes that generate high volumes of particulates and condensable by-products in manufacturing HBLEDs and power semiconductors. Featuring a knock-down stage plus two stages of user-selectable filter elements, the traps are capable of up to 40,968 cm³ of solids accumulation with >99% efficiency for particulates and condensables.

Offered in 25.4, 30.48 and 40.64 mm diameter models, including a cooling option to facilitate removing condensables, the inlet traps can be designed to accommodate different production processes and pump capacities to 2000 CFM. They are available with activated alumina or charcoal filter elements for vapours, Sodasorb and other specialised elements for trapping other contaminants.