LPKF ProtoLaser LDI laser system for microfluidic applications

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LPKF, in cooperation with Slovenian company Aresis and the University of Ljubljana, is developing processes for structuring of microcomponents. Maskless UV laser direct imaging (LDI) of photosensitive polymers (photoresists) offers advantages over classic mask projection techniques.

Research and development in the field of microfluidic devices and micromechanical systems benefit from fast prototyping processes such as LPKF-LDI. Lab-on-a-chip devices help miniaturise processes and reduce liquid sample sizes as well as waste. This opens up possibilities for the LDI process in medicine, biology, chemistry and physics. The applications are diverse: blood and cell analysis, medical diagnosis and screening, sensors (chemical, biological, environmental and weapons technology; automotive engineering), synthesis of chemicals and physical experiments.

With LDI, a scanner-guided laser beam writes structures directly, rapidly and precisely onto the photoresist without using a mask. This results in smooth side wall edges. The LPKF ProtoLaser LDI can be used for production of microfluidic devices as well as MEMS, BioMEMS, integrated optics and photonic experiments with microscale structures. In terms of precision, the method is claimed to surpass all comparable systems for mask projection. Investment costs are said to be lower than for electron beam lithography and for numerous mask alignment systems. LDI even enables structuring of elements with web widths of less than a micron.

Other features include: substrate exposure with a focused 375 nm TEM00 UV laser beam, which can also be used for standard UV resists; software-controllable laser focus (1-3 μm) for changing precision requirements; and an integrated camera for fine positioning of substrate and automated self-calibration, as well as stitching mechanisms for real-time manufacturing of large samples.